![]() 229910010293 ceramic material Inorganic materials 0.000 description 2.238000004519 manufacturing process Methods 0.000 abstract description 6.238000001514 detection method Methods 0.000 abstract description 8.239000000463 material Substances 0.000 claims abstract description 17.Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.) Filing date Publication date Application filed by Tokin Corp filed Critical Tokin Corp Priority to JP8131035A priority Critical patent/JPH09292229A/en Publication of JPH09292229A publication Critical patent/JPH09292229A/en Status Pending legal-status Critical Current Links Original Assignee Tokin Corp Priority date (The priority date is an assumption and is not a legal conclusion. ![]() Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.) Inventor Koichi Shuda 浩一 習田 Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.) Pending Application number JP8131035A Other languages Japanese ( ja) ![]() ![]() Info Publication number JPH09292229A JPH09292229A JP8131035A JP13103596A JPH09292229A JP H09292229 A JPH09292229 A JP H09292229A JP 8131035 A JP8131035 A JP 8131035A JP 13103596 A JP13103596 A JP 13103596A JP H09292229 A JPH09292229 A JP H09292229A Authority JP Japan Prior art keywords piezoelectric vibration gyro vibrators piezoelectric vibrators piezoelectric vibration Prior art date Legal status (The legal status is an assumption and is not a legal conclusion. Google Patents Piezoelectric vibration gyro Google Patents JPH09292229A - Piezoelectric vibration gyro JPH09292229A - Piezoelectric vibration gyro ![]()
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